A new end station for high energy (30–70 keV) X-ray diffraction experiments with nano-focus (150–500 nm) beam sizes has been installed at beamline ID11 at the ESRF. We review some of the early results from this instrument. High resolution crystal structure determination and refinement could be achieved with samples smaller than 3 μm in size. Near surfaces, the in-plane strain has been mapped as a function of depth in an oxide coating only 6 μm in thickness with 200 nm resolution. Via scanning diffraction tomography methods, then type-III intra-grain strain fields have been measured for fine-grained materials (<5 μm grain size). With the ESRF Extremely Brilliant Source upgrade (ESRF-EBS project), as well as new detectors coming online, we expect many new opportunities in the near future. Higher X-ray flux will bring about decreased scanning times, higher spatial resolution, and larger Q ranges. While scanning techniques can pose challenges for data reduction, they offer a new way to study a wide range of materials, and mapping of larger sample volumes at the highest spatial resolution becomes feasible.

在ESRF的光束线ID11处安装了一个新的终端站，用于纳米聚焦（150-500 nm）光束尺寸的高能（30-70 keV）X射线衍射实验。我们回顾了该仪器的一些早期结果。尺寸小于3μm的样品可以实现高分辨率晶体结构的确定和精细化。在表面附近，已将平面应变映射为厚度仅为6μm，分辨率为200 nm的氧化物涂层中的深度的函数。通过扫描衍射层析成像方法，然后测量了细晶粒材料（晶粒尺寸<5μm）的III型晶粒内应变场。随着ESRF极其出色的源升级（ESRF-EBS项目）以及新的探测器投入使用，我们预计在不久的将来会有许多新的机会。较高的X射线通量将减少扫描时间，较高的空间分辨率和较大的Q范围。尽管扫描技术可能会给减少数据量带来挑战，但它们提供了一种研究多种材料的新方法，并且以最高空间分辨率绘制更大样本量的图变得可行。