In this work, (W,Ti)B₂ films with different stoichiometric ratio Ti/W deposited on silicon and 304 stainless steel by radio frequency magnetron sputtering are presented. The coatings were deposited from plasma spark sintered targets obtained from the mixture of pure boron, tungsten and titanium powders. It is shown that during plasma spark sintering process using overstoichiometric boron and a low content of titanium change the WB₂ to WB₄ phase with almost no secondary phases. Subsequently, the impact of titanium content on the films properties is investigated systematically, including the chemical and phase composition, crystalline structure, surface and cross-section morphology. Simultaneously, nano-indentation test and ball-on-disk tribometery are performed to analyse the hardness and tribological properties of the films. It is shown that deposited films with titanium content of 3.6 and 5.5 at.% are formed in the zone T of the Thornton's Structural Zone Model. In opposite to α-WB₂ magnetron sputtered coatings they are more flexible and hard nanocomposite coatings. The results show that the addition of titanium is apparently changing the film structure from nanocrystalline columnar to amorphous, very dense and compact structure with the addition of TiB₂ phase. That films are simultaneously hard (H > 37.5 GPa), have high hardness to effective Young's modulus ratio values (H/E^⁎ > 0.1) and elastic recovery (W_e > 60%) appropriate for tough and resistant to cracking materials. The presented (W,Ti)B₂ films exhibit also tribological and corrosion properties better than unalloyed coatings.

在这项工作中，提出了通过射频磁控溅射在硅和304不锈钢上沉积具有不同化学计量比Ti / W的（W，Ti）B ₂膜。涂层是从纯硼，钨和钛粉末的混合物中获得的等离子火花烧结靶沉积而成的。结果表明，在使用化学计量过量的硼和少量钛的等离子火花烧结过程中，WB ₂变为WB ₄相几乎没有次级相。随后，系统地研究了钛含量对薄膜性能的影响，包括化学和相组成，晶体结构，表面和截面形态。同时，进行了纳米压痕试验和圆盘摩擦学测试，以分析膜的硬度和摩擦学性能。结果表明，在桑顿结构区模型的区域T中形成了钛含量为3.6和5.5原子％的沉积膜。在相反的α-WB ₂磁控溅射镀膜它们是更柔软和坚硬的纳米复合镀膜。结果表明，添加TiB ₂相后，添加钛显然将薄膜结构从纳米晶柱状变为无定形，非常致密和致密的结构。该膜同时坚硬（H> 37.5 GPa），具有高的有效杨氏模量比值（H / ^E⁎  > 0.1）和 适合于韧性和抗裂性的弹性回复率（W _e > 60％）。本发明的（W，Ti）B ₂膜还显示出比非合金涂层更好的摩擦学和腐蚀性能。