Abstract We fabricated triboelectric nanogenerators (TENGs) consisting of an Al electrode, a polyimide dielectric layer, a ZnO dielectric layer, and an indium tin oxide (ITO) electrode, and we observed an enhancement of the output voltage that was due to Al doping in the ZnO layer. The variation in the surface of the Al doped zinc oxide (AZO) layer, which was found to depend on the Al doping concentration, was studied by using scanning electron microscopy. The existence of Al particles was identified from the X-ray photoelectron spectroscopy results. The open-circuit voltage and the short-circuit current of the TENGs with 2% and 5% Al doping in the ZnO layer and operating in the vertical contact-separation mode were larger than those of TENGs having a ZnO layer without Al doping, respectively. The Al doping reduced the asymmetry of negative and positive output voltages and shortened the duration of the positive peaks. The enhancement in the output properties of the TENGs due to the dielectric properties of the Al particles, which was theoretically analyzed in the contact-separation mode operated TENGs with dimensionless formulations, which is compared with the experimental results.

中文翻译：

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由于在氧化锌层中掺杂 Al 提高摩擦纳米发电机的输出电压

摘要 我们制造了由 Al 电极、聚酰亚胺介电层、ZnO 介电层和氧化铟锡 (ITO) 电极组成的摩擦纳米发电机 (TENG)，我们观察到由于 Al 掺杂导致输出电压增强。氧化锌层。通过使用扫描电子显微镜研究了 Al 掺杂的氧化锌 (AZO) 层表面的变化，发现它取决于 Al 掺杂浓度。从 X 射线光电子能谱结果确定了 Al 颗粒的存在。在 ZnO 层中掺杂 2% 和 5% Al 并在垂直接触分离模式下工作的 TENGs 的开路电压和短路电流分别大于具有未掺杂 Al 的 ZnO 层的 TENGs 的开路电压和短路电流. Al 掺杂减少了负输出电压和正输出电压的不对称性，并缩短了正峰值的持续时间。由于铝颗粒的介电性能，TENG 的输出性能增强，这在具有无量纲配方的接触分离模式操作的 TENG 中进行了理论分析，并将其与实验结果进行了比较。