High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments.,Journal of Hazardous Materials

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High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments.
Journal of Hazardous Materials ( IF 12.2 ) Pub Date : 2020-03-20 , DOI: 10.1016/j.jhazmat.2020.122486
Hoang-Phuong Phan ₁ , Toan Dinh ₂ , Tuan-Khoa Nguyen ₁ , Afzaal Qamar ₃ , Thanh Nguyen ₁ , Van Thanh Dau ₄ , Jisheng Han ₁ , Dzung Viet Dao ₄ , Nam-Trung Nguyen ₁

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With its unprecedented properties over conventional rigid platforms, flexible electronics have been a significant research topic in the last decade, offering a broad range of applications from bendable display, flexible solar-energy systems, to soft implantable-devices for health monitoring. Flexible electronics for harsh and hazardous environments have also been extensively investigated. In particular, devices with stretchability and bend-ability as well as tolerance to extreme and toxic operating conditions are imperative. This work presents silicon carbide grown on silicon and then transferred onto polyimide substrate as a new platform for flexible sensors for hostile environments. Combining the excellent electrical properties of SiC and high temperature tolerance of polyimide, we demonstrated for the first time a flexible SiC sensors that can work above 400 °C. This new sensing platform opens exciting opportunities toward flexible sensing applications in hazardous environments.

中文翻译：

基于高温碳化硅的柔性电子设备，用于监控危险环境。

在过去的十年中，柔性电子器件具有比常规刚性平台空前的性能，已成为重要的研究课题，其应用范围广泛，从可弯曲的显示器，柔性太阳能系统到用于健康监测的软植入设备。还已经广泛研究了用于恶劣和危险环境的柔性电子设备。特别是必须具有伸缩性和弯曲性以及对极端和有毒操作条件的耐受性的设备。这项工作提出了在硅上生长然后转移到聚酰亚胺衬底上的碳化硅，作为用于恶劣环境的柔性传感器的新平台。结合了SiC的优异电性能和聚酰亚胺的高温耐受性，我们首次展示了可在400°C以上工作的柔性SiC传感器。这个新的传感平台为危险环境中的灵活传感应用提供了令人兴奋的机遇。

更新日期：2020-03-21

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