We report on optical waveguides produced by a femtosecond laser in 6H–SiC crystals. Their guiding properties have been investigated at a wavelength of 1064 nm, and confocal micro-Raman images have been obtained at an excitation wavelength of 532 nm. The results demonstrate that mode profiles can be tailored by the adjustment of writing parameters, and the blueshift of the spectrum (at around 787.05 cm−1) mainly takes place in the irradiated areas. From images of Raman intensity and spectral shift, it is obvious that optical properties in guiding regions are well preserved. These waveguides may have potential applications in integrated optics and quantum photonics.

中文翻译：

---

用于波导器件的 6H-SiC 晶体的飞秒激光改性

我们报告了飞秒激光器在 6H-SiC 晶体中产生的光波导。在 1064 nm 的波长下研究了它们的引导特性，并在 532 nm 的激发波长下获得了共焦微拉曼图像。结果表明，模式分布可以通过调整写入参数来定制，光谱的蓝移（在 787.05 cm-1 附近）主要发生在照射区域。从拉曼强度和光谱位移的图像来看，很明显，引导区域的光学特性得到了很好的保留。这些波导可能在集成光学和量子光子学中具有潜在的应用。