A great challenge in power/RF electronics has been achieving integrated magnetic inductors with high quality factor ( $Q$ -factor) and high inductance density at gigahertz frequencies. In this article, integrated solenoid magnetoelectric inductors based on FeGaB/Al₂O₃ multilayer as the magnetic core are designed to operate at high gigahertz frequencies, high $Q$ -factor, and inductance tunability. A high self-resonant frequency of >3 GHz with a flat inductance of 1.4 nH and a peak $Q$ -factor of ~32.7 has been achieved within a wide operating frequency ranging from 0.3 to 3 GHz with magnetic annealing treatment to enhance the inductance density and $Q$ -factor. Two different inductance-tuning methods are tested. For magnetic field tuning, an external magnetic field from 0 to 500 Oe is applied to achieve an inductance tunability $\Delta {\mathbf {L}/\mathbf {L}} _{\mathbf {min}}$ of ~69.2%. Voltage tuning is also tested based on the magnetoelectric coupling between FeGaB/Al₂O₃ multilayer and ferroelectric slab achieving a maximum tunability of 191% with a flat inductance within the operating frequency. Such a high $Q$ -factor and high inductance density together with giant electrical tunability will greatly improve the integration level and performance of tunable radio frequency integrated circuits while reducing their power consumption and cost.

中文翻译：

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集成可调磁电射频电感器

功率/射频电子领域的一个巨大挑战是实现具有高品质因数（ $Q$ -factor) 和千兆赫频率下的高电感密度。在本文中，基于 FeGaB/Al ₂ O ₃多层膜作为磁芯的集成螺线管磁电电感器设计用于在高千兆赫兹频率、高 $Q$ -因子和电感可调性。>3 GHz 的高自谐振频率，具有 1.4 nH 的平坦电感和峰值 $Q$ 在 0.3 至 3 GHz 的宽工作频率范围内通过磁性退火处理实现了 ~32.7 的系数，以提高电感密度和 $Q$ -因素。测试了两种不同的电感调谐方法。对于磁场调谐，施加 0 到 500 Oe 的外部磁场以实现电感调谐 $\Delta {\mathbf {L}/\mathbf {L}} _{\mathbf {min}}$ 约 69.2%。电压调谐也基于 FeGaB/Al ₂ O ₃多层和铁电板之间的磁电耦合进行测试，在工作频率内实现了 191% 的最大可调谐性和平坦的电感。这么高 $Q$ 因数和高电感密度以及巨大的电可调性将大大提高可调射频集成电路的集成度和性能，同时降低其功耗和成本。