This paper reports a novel mode-localized resonant accelerometer, which can keep high sensitivity even over a wide range. To improve the adjustability of sensitivity, a new four degree of freedom (4-DoF) series-parallel resonator array is proposed. Three sensing resonators are mechanically coupled together in series by folding beams and the fourth sensitivity-tuning resonator is electrically coupled in parallel with the sensing system. When the stiffness perturbation caused by acceleration occurs, a change of modal amplitude ratio due to the mode localization phenomenon can be detected. By tuning the voltage on the sensitivity-tuning resonator, the sensitivity of the accelerometer can be altered to keep the amplitude ratio within a reasonable range. The theoretical model of the accelerometer is established and analyzed by numerical method. To confirm the feasibility of the design, a device fabricated by SOI-MEMS technology is tested under open-loop circuit. The measured amplitude ratio sensitivity varies from 1.14/g to 23.37/g with the change of the tuning voltage, and the sensitivity adjustment range reaches 2050%. [2019-0199]

中文翻译：

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基于模式定位的串并联机电耦合谐振器的灵敏度可调加速度计

本文报道了一种新型的模式局域谐振加速度计，即使在很宽的范围内也能保持高灵敏度。为了提高灵敏度的可调性，提出了一种新的四自由度（4-DoF）串并联谐振器阵列。三个传感谐振器通过折叠梁串联机械耦合在一起，第四个灵敏度调谐谐振器与传感系统并联电耦合。当发生加速度引起的刚度扰动时，可以检测到由于模态局部化现象引起的模态幅度比的变化。通过调整灵敏度调谐谐振器上的电压，可以改变加速度计的灵敏度，以将幅度比保持在合理范围内。建立了加速度计的理论模型，并采用数值方法进行了分析。为确认设计的可行性，在开环电路下对采用SOI-MEMS技术制作的器件进行了测试。测得的幅度比灵敏度随调谐电压的变化从1.14/g变化到23.37/g，灵敏度调节范围达到2050%。[2019-0199]