The rapid development of microfluidic technology has increased the demand for the integration of driving circuits in the microfluidic devices. We have proposed a novel on-chip electroosmotic (EOF) micropump integrated with a high-voltage (HV) generator. The HV (49.8 V) generator is based on a Dickson charge pump, which is fabricated on a silicon-on-insulator (SOI) substrate by the standard CMOS process, and the isolation is achieved by MEMS post-processed deep trench isolation. The size of the 49.8 V generator is $425\times 353\,\,\mu \,\,\text{m}^{2}$ . The HV required for the successful operation of the micropump was generated by the integrated driving circuit with a low-voltage power supply. The maximum flow velocity and flow rate of the proposed EOF micropump were measured as 137 $\mu $ m/s and 167 nL/min, respectively when it was driven by the integrated 49.8 V generator. The efficiency of the micropump is demonstrated by comparing it with the previously reported micropumps. The proposed integration technique is reliable and effective, and potentially boosts the practical applications of lab-on-chip devices. [2019-0206]

中文翻译：

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集成高压发生器的基于片上 CMOS-MEMS 的电渗流微泵

微流控技术的快速发展增加了对驱动电路在微流控器件中集成的需求。我们提出了一种与高压 (HV) 发电机集成的新型片上电渗 (EOF) 微泵。HV (49.8 V) 发生器基于 Dickson 电荷泵，采用标准 CMOS 工艺在绝缘体上硅 (SOI) 衬底上制造，通过 MEMS 后处理深沟槽隔离实现隔离。49.8 V 发电机的尺寸为 $425\times 353\,\,\mu\,\,\text{m}^{2}$ . 微型泵成功运行所需的高压是由集成驱动电路和低压电源产生的。所提出的 EOF 微型泵的最大流速和流速测量为 137 $\亩 $ 当它由集成的 49.8 V 发电机驱动时，分别为 m/s 和 167 nL/min。微型泵的效率通过与之前报道的微型泵进行比较来证明。所提出的集成技术可靠且有效，并有可能促进芯片实验室设备的实际应用。[2019-0206]