We evaluate a procedure that is meant to ensure a highly accurate alignment between laser-doped lines and either screen-printed metal contacts or laser contact openings (LCO) for subsequent galvanic plating of the metal contacts. For both process routes, we prove that the application of the procedure significantly increases the alignment accuracy, discusses potential error sources, and identifies the major challenges for avoiding misalignment. As shown by the presented experiments, the use of screen-printed contacts is challenging for the alignment, since the laser doping process “needs to foresee” the screen print. For plated contacts, however, a much more accurate alignment can be achieved, since the LCO process “can react” on the previously applied laser-doped pattern. As we demonstrate, we are able to combine 10-μm-wide LCO lines with 36-μm-wide laser-doped lines (while ensuring that the passivation layer is only opened within the laser-doped area).

中文翻译：

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评估校准局部激光掺杂和金属化的程序

我们评估了一种程序，该程序旨在确保激光掺杂线与丝网印刷金属触点或激光触点开口 (LCO) 之间的高度精确对准，以便随后对金属触点进行电镀。对于这两种工艺路线，我们证明该程序的应用显着提高了对准精度，讨论了潜在的误差源，并确定了避免未对准的主要挑战。正如所提供的实验所示，使用丝网印刷触点对对准具有挑战性，因为激光掺杂过程“需要预见”丝网印刷。然而，对于电镀触点，可以实现更精确的对准，因为 LCO 工艺“可以”对先前应用的激光掺杂图案进行“反应”。正如我们所展示的，