In this article, a high-throughput screening method for thin-film magnets was proposed. Composition gradient thin films were deposited using a sputtering machine which equipped a substrate rotation and a moving mask mechanism. Local surface leakage magnetic flux was measured by a tunneling-magnetoresistance sensor continuously all over the substrate. Local coercivity on the films was estimated from the change in the leakage magnetic flux with a step-by-step demagnetization. The detailed B-H characteristics are measured using a vibrating sample magnetometer with preparing matrix composition thin films. R-Fe-B pseudo ternary composition gradient thin films were prepared and measured. In (Nd, Y, Ce)18.5Fe73.8B7.7 composition, the simultaneous substitution of Y and Ce for Nd achieved both high magnetization and coercivity.

中文翻译：

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薄膜 R2Fe14B 磁体的高通量筛选方法


本文提出了一种薄膜磁体的高通量筛选方法。使用配备有基板旋转和移动掩模机构的溅射机来沉积成分梯度薄膜。通过隧道磁阻传感器在整个基板上连续测量局部表面漏磁通量。薄膜上的局部矫顽力是根据逐步退磁的漏磁通量的变化来估计的。使用振动样品磁力计并制备基质成分薄膜来测量详细的 BH 特性。制备并测量了R-Fe-B伪三元成分梯度薄膜。在(Nd,Y,Ce)18.5Fe73.8B7.7成分中，Y和Ce同时取代Nd实现了高磁化强度和矫顽力。