High aspect ratio microstructures (HARMS) are of great importance for many application fields. Many defects are generated during the fabrication processes, especially in line microstructures, and it is necessary to examine the quality of the structures after each process. However, there is no suitable efficient nondestructive detection method to monitor microstructures during the fabrication processes. In this paper, an optical detection method capable of detecting the structures by analyzing the reflection of light on the line HARMS is proposed. According to the image of reflected visible light, this method can determine whether there are defects in structures, so as to realize efficient detection. Preliminary simulations and experiments have been performed to confirm the feasibility and validity of the proposed method for detecting line microstructures. This method is expected to obtain more information about microstructures by further optimizing system parameters.

中文翻译：

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高纵横比微结构的光学检测方法

高长宽比的微结构（HARMS）对于许多应用领域都非常重要。在制造过程中会产生许多缺陷，特别是在生产线微结构中，并且在每个过程之后都必须检查结构的质量。然而，在制造过程中，没有合适的有效的非破坏性检测方法来监测微结构。提出了一种能够通过分析线HARMS上的光反射来检测结构的光学检测方法。根据反射的可见光图像，可以确定结构是否存在缺陷，从而实现高效检测。进行了初步的仿真和实验，以验证所提出的用于检测线微结构的方法的可行性和有效性。期望通过进一步优化系统参数来获得有关微结构的更多信息。