Abstract Transparent MoOx thin films with varied composition were successfully prepared by sputtering and the effects of oxygen contents on the composition stoichiometry, defect states, work functions, electrical and optical properties of MoOx films were systematically studied. These thin films were then utilized in cadmium telluride solar cells to act as back contact buffers. As compared with the CdTe solar cells with Au back contact, deteriorated performance was witnessed in those with MoOx buffers. The deterioration was demonstrated to be caused by the oxidation of CdTe surface, the large valence band offset and the insufficient work function. Finally, by optimizing the back contacts to form a CuCl/MoOx/ITO composite back contact, the efficiency was improved to 11.8%. This work demonstrates feasible approaches to prepare MoOx thin films with varied oxygen concentrations which could be easily applied to many other thin film solar cells and provide important indications in the preparation and optimization of the performance for bifacial devices.

中文翻译：

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具有不同氧含量的溅射 MoOx 薄膜的表征及其在 CdTe 太阳能电池中作为背接触的应用

摘要 采用溅射法成功制备了不同成分的透明MoOx薄膜，系统研究了氧含量对MoOx薄膜的组成化学计量、缺陷态、功函数、电学和光学性能的影响。然后将这些薄膜用于碲化镉太阳能电池，以充当背接触缓冲器。与具有 Au 背接触的 CdTe 太阳能电池相比，具有 MoOx 缓冲剂的电池性能下降。证明劣化是由 CdTe 表面氧化、大价带偏移和功函数不足引起的。最后，通过优化背接触形成CuCl/MoOx/ITO复合背接触，效率提高到11.8%。