In order to improve the adaptability of piezoelectric hydraulic linear motor, a piezoelectric hydraulic linear motor with velocity self-monitoring (PHLMVS) is presented. PHLMVS is driven by a serial-connection five-chamber piezoelectric pump which contains five piezoelectric diaphragm. The velocity self-monitoring of piezoelectric hydraulic linear motor under different external loads was realized by monitoring the sensing voltage of the middle piezoelectric diaphragm (A3). Surface electrodes of five piezoelectric diaphragms are divided into larger driving unit and smaller sensing unit by using the segmented electrode method. The velocity characteristics and the sensing voltage characteristics of PHLMVS are investigated. Experimental results indicate that the optimal frequency of PHLMVS can be achieved and determined by itself through monitoring the A3 sensing voltage. At a fixed frequency of 500 Hz, A3 sensing voltage has a good correlation with the velocity. Further, least-square method is used to fit the sensing voltage and the velocity. And the correlation coefficient R² for PHLMVS with 0/50/100 g external loads are calculated as 0.974, 0.982 and 0.978 respectively.

为了提高压电液压线性电动机的适应性，提出了一种具有速度自监测（PHLMVS）的压电液压线性电动机。PHLMVS由包含五个压电隔膜的串联五腔压电泵驱动。通过监测中间压电隔膜（A3）的感应电压，实现了压电液压线性电动机在不同外部负载下的速度自我监测。采用分段电极法将五个压电膜片的表面电极分为较大的驱动单元和较小的传感单元。研究了PHLMVS的速度特性和感测电压特性。实验结果表明，通过监控A3感应电压，可以实现并确定PHLMVS的最佳频率。在500 Hz的固定频率下，A3感应电压与速度具有良好的相关性。此外，最小二乘法用于拟合感测电压和速度。和相关系数R对于外部负载为0/50/100 g的PHLMVS，其²分别计算为0.974、0.982和0.978。