Phase-gradient metasurfaces have the potential to revolutionize photonics by offering ultrathin alternatives to a wide range of common optical elements, including bulky refractive optics, waveplates, and axicons. However, the fabrication of state-of-the-art metasurfaces typically involves several expensive, time-consuming, and potentially hazardous processing steps. To address this limitation, a facile methodology to construct phase-gradient metasurfaces from an exposed standard electron beam resist is developed. The method dramatically cuts the required processing time and cost as well as reduces safety hazards. The advantages of the method are demonstrated by constructing high-performance flat optics based on the Pancharatnam-Berry phase gradient concept for the entire visible wavelength range. Manufactured devices include macroscopic (1 cm diameter) positive lenses, gratings exhibiting anomalous reflection, and cylindrical metalenses on flexible plastic substrates.

中文翻译：

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暴露的抗蚀剂制成的大规模超表面

通过提供超薄替代品来替代包括笨重的折射光学器件，波片和轴锥的各种常见光学元件，相位梯度超表面具有改变光子学的潜力。但是，最先进的超颖表面的制造通常涉及几个昂贵，费时且潜在危险的处理步骤。为了解决该限制，开发了一种从暴露的标准电子束抗蚀剂构造相梯度超颖表面的简便方法。该方法大大减少了所需的处理时间和成本，并减少了安全隐患。通过在整个可见波长范围内基于Pancharatnam-Berry相梯度概念构造高性能平面光学器件，可以证明该方法的优势。