Abstract Understanding the relationship between the structure and magnetic properties of soft magnetic thin films is important in the development of magnetic sensors and electronic devices. This work has systematically studied how the annealing temperature changes the morphology and hence the magnetic properties of 60 nm FeGaSiB thin films. The as-grown and 100 °C annealed films were amorphous/nanocrystalline with soft magnetic properties. As the annealing temperature increased, so did the coercive field of the films, which was found to be due to the formation of polycrystalline grains, with random texture. The grain size increased with increasing annealing temperature, while the Curie Temperature and magnetostriction constant decreased. For the saturation induction, there was a large decrease between the 100 °C annealed film and the 250 °C annealed film, due to the film morphology changing from amorphous to polycrystalline. Thus there is strong correlation between the crystallinity and the soft magnetic behaviour of FeGaSiB films.

中文翻译：

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退火温度对FeGaSiB薄膜结构和磁性能的影响

摘要 了解软磁薄膜的结构与磁性能之间的关系对于磁传感器和电子设备的发展具有重要意义。这项工作系统地研究了退火温度如何改变 60 nm FeGaSiB 薄膜的形貌以及磁性能。生长的和 100°C 退火的薄膜是具有软磁特性的非晶/纳米晶。随着退火温度的升高，薄膜的矫顽场也随之增加，这是由于多晶晶粒的形成，具有随机织构。晶粒尺寸随着退火温度的升高而增大，而居里温度和磁致伸缩常数减小。对于饱和感应，由于薄膜形态从非晶态变为多晶态，100°C 退火膜和 250°C 退火膜之间有很大的下降。因此，FeGaSiB 薄膜的结晶度和软磁行为之间存在很强的相关性。