An active magnetic field probe is proposed in this letter for use in near-field measurement in ICs. The probe is fabricated in a four-layer printed circuit board (PCB), and an amplification circuit is integrated on the top layer of the probe. Compared with commercial probe, the proposed probe has high sensitivity and miniature size and can be used to detect weak signals in narrow and complex spaces. The maximum size of the probe is less than 60 mm × 19 mm. The transfer factor is enhanced by 39 dB. The working band (9 kHz-1 GHz) is enough to locate the fault points in most engineering applications. Compared with the passive probe, the proposed probe is much compatible with modern IC diagnosis. In addition, a new calibration is proposed to obtain an accurate calibration coefficient. It is necessary for many applications, which need high precision near-field data.

中文翻译：

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用于集成电路近场微弱信号测量的微型有源磁探头设计


这封信中提出了一种用于 IC 近场测量的有源磁场探头。该探头采用四层印刷电路板 (PCB) 制造，放大电路集成在探头的顶层。与商业探针相比，所提出的探针具有高灵敏度和微型尺寸，可用于检测狭窄和复杂空间中的微弱信号。探头最大尺寸小于60mm×19mm。传输因子提高了 39 dB。工作频段（9 kHz-1 GHz）足以定位大多数工程应用中的故障点。与无源探头相比，所提出的探头与现代 IC 诊断更加兼容。此外，还提出了一种新的校准方法来获得准确的校准系数。对于许多需要高精度近场数据的应用来说，这是必要的。