This letter reports a novel fused silica microfluidic device with pressure sensing capability that is fabricated by integrated additive and subtractive manufacturing (IASM) method. The sensor consists of a capillary and a 3D printed glass reservoir, where the reservoir volume change under pressure manifests liquid level deviation inside the capillary, thus realizing the conversion between small pressure change into large liquid level variation. Thanks to the design flexibility of this unique IASM method, the proposed microfluidic device is fabricated with liquid-in-glass thermometer configuration, where the reservoir is sealed following a novel 3D printing assisted glass bonding process. And liquid level is interrogated by a fiber-optic sensor based on multimode interference (MMI) effect. This proposed microfluidic device is attractive for chemical and biomedical sensing because it is flexible in design, and maintains good chemical and mechanical stability, and adjustable sensitivity and range.

中文翻译：

---

通过光纤折射法询问微流体压力传感器的玻璃 3D 打印

这封信报告了一种具有压力传感能力的新型熔融石英微流体装置，该装置采用集成增材减材制造 (IASM) 方法制造。该传感器由毛细管和3D打印玻璃储液器组成，压力作用下储液器容积的变化体现了毛细管内部的液位偏差，从而实现了小压力变化到大液位变化的转换。由于这种独特的 IASM 方法的设计灵活性，所提出的微流体装置采用玻璃内液体温度计配置制造，其中储液器按照新型 3D 打印辅助玻璃粘合工艺进行密封。液位由基于多模干涉 (MMI) 效应的光纤传感器进行询问。