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Phase-Resolved Measurement of Atmospheric-Pressure Radio-Frequency Pulsed Discharges in Ar/CH4/CO2 Mixture
Plasma Chemistry and Plasma Processing ( IF 2.6 ) Pub Date : 2020-03-14 , DOI: 10.1007/s11090-020-10071-5
Zehui Liu , Bangdou Huang , Wenchao Zhu , Cheng Zhang , Xin Tu , Tao Shao

In order to comprehensively investigate the discharge characteristics of an atmospheric-pressure radio-frequency (RF) pulsed discharge in Ar/CH4/CO2, a phase-resolved measurement is given in this paper. Firstly, the discharge characteristics of RF plasma in a gas mixture of Ar, CO2 and CH4 are investigated under different parameters. It is found peak power is more efficient than duty cycle in increasing the discharge area. Besides, a phase-resolved morphology of RF plasma is given. The discharge in the positive cycle is longer in length and stronger in emission intensity than in the negative cycle. Secondly, different activation paths of species have been obtained by using phase-resolved optical emission spectroscopy. Ar species is mainly activated by electron collision effect, while CH and C2 are mainly activated by Ar metastable species. Finally, detailed electron kinetics is analyzed. The results show that most energy is transferred to the vibrational excitation compared to elastic activation, electronic excitation, and ionization under different ratios of CO2 and CH4 to Ar. Besides, under a higher ratio of CH4 and CO2 to Ar, the generating rate of species and power loss rate are higher. It proves that higher fraction of CO2 and CH4 is better for the conversion rate and energy efficiency under RF discharge in theory, which guides the reforming of CH4 and CO2 in RF discharge.

中文翻译:

Ar/CH4/CO2 混合物中大气压力射频脉冲放电的相位分辨测量

为了全面研究Ar/CH4/CO2中大气压射频(RF)脉冲放电的放电特性,本文给出了相位分辨测量。首先,研究了不同参数下 RF 等离子体在 Ar、CO2 和 CH4 气体混合物中的放电特性。发现峰值功率在增加放电面积方面比占空比更有效。此外,还给出了射频等离子体的相位分辨形态。与负循环相比,正循环中的放电长度更长,发射强度更强。其次,通过使用相位分辨光发射光谱获得了物种的不同激活路径。Ar物种主要通过电子碰撞效应激活,而CH和C2主要由Ar亚稳物种激活。最后,详细的电子动力学分析。结果表明,在 CO2 和 CH4 与 Ar 的不同比例下,与弹性激活、电子激发和电离相比,大部分能量转移到振动激发。此外,在较高的 CH4 和 CO2 与 Ar 的比率下,物种的生成率和功率损失率较高。从理论上证明,较高比例的CO2和CH4有利于RF放电下的转化率和能量效率,从而指导RF放电中CH4和CO2的重整。物种的产生率和功率损失率较高。从理论上证明,较高比例的CO2和CH4有利于RF放电下的转化率和能量效率,从而指导RF放电中CH4和CO2的重整。物种的产生率和功率损失率较高。从理论上证明,较高比例的CO2和CH4有利于RF放电下的转化率和能量效率,从而指导RF放电中CH4和CO2的重整。
更新日期:2020-03-14
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