Abstract Hierarchical micro/nanostructure surface structures with different spatial characteristics are achieved after irradiation of crystalline silicon via femtosecond (fs) laser pulses (800 nm, 120 fs, 1 kHz) with the sample submerged in ethanol. According to laser pulse energy and fabrication parameters (such as scanning speed and superimposed writing), a characteristic morphology evolution of ovoid-like smooth modified area, ripple-like, wave-like, and coral-like micro/nanostructures is demonstrated, and the underline principle is discussed. The amorphization of fs laser-modified area is verified and investigated by Raman spectroscope. These modified structures have potential applications in sensors, silicon photovoltaic cells, and sterilization.

中文翻译：

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通过飞秒激光在液体中加工晶体硅表面：分级微/纳米结构和非晶化

摘要 通过飞秒 (fs) 激光脉冲 (800 nm, 120 fs, 1 kHz) 照射晶体硅后，将样品浸入乙醇中，获得具有不同空间特征的分层微/纳米结构表面结构。根据激光脉冲能量和制造参数（如扫描速度和叠加写入），证明了卵形光滑修饰区、波纹状、波浪状和珊瑚状微/纳米结构的特征形态演变，并讨论下划线原则。通过拉曼光谱仪验证和研究了 fs 激光改性区域的非晶化。这些改进的结构在传感器、硅光伏电池和消毒方面具有潜在的应用。