There is a growing interest in the development of high energy on-chip capacitive energy storage units for application in microelectronic devices. Lithium-ion capacitor (LIC) typically comprising battery-type and capacitor-type electrodes offer the opportunity for an improved energy density in capacitive energy storage. In this work, an aqueous on-chip LIC was fabricated using carbon microelectromechanical systems (C-MEMS) technique. Oxygen plasma-treated 3D carbon microelectrode arrays served as the capacitor-type electrode in the LIC, while LiFePO₄ integrated on the 3D carbon microelectrode arrays was used as the battery-type cathode. Electrochemical performance evaluation shows that the aqueous on-chip LIC can deliver an areal density up to ~5.03 μWh cm⁻²_, which is ~5 times higher than the oxygen plasma-treated symmetric carbon microelectrode-based electrochemical capacitor.

对用于微电子设备中的高能量片上电容性能量存储单元的开发越来越感兴趣。通常包括电池型和电容器型电极的锂离子电容器（LIC）为电容式储能中的能量密度提高提供了机会。在这项工作中，使用碳微机电系统（C-MEMS）技术制造了片上含水LIC。氧等离子体处理的3D碳微电极阵列用作LIC中的电容器型电极，而集成在3D碳微电极阵列上的LiFePO ₄用作电池型阴极。电化学性能评估表明，片上含水LIC可以提供高达〜5.03μWhcm ^-2的面密度_， 它比氧等离子体处理的对称碳微电极基电化学电容器高约5倍。