Abstract This study examined the tribological behavior of a ta-C coating fabricated at a substrate bias of −100 V via filtered cathodic vacuum arc (FCVA) deposition. Defects in the ta-C coating were categorized as droplets, pores, and spikes, considering the morphological, structural, and mechanical properties of the ta-C surface. A friction test was conducted at 170 °C in ambient air using a ball-on-disk tribometer. The friction coefficient was 0.08 during the steady state and the wear rate was 4.3 × 10−6 mm3/Nm. To explain the friction and wear behavior, the morphological and structural properties of the defects in the designated area were compared among different sliding cycles.

中文翻译：

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缺陷对过滤阴极真空电弧沉积制备的ta-C涂层磨损行为的影响

摘要 本研究检验了通过过滤阴极真空电弧 (FCVA) 沉积在 -100 V 基板偏压下制造的 ta-C 涂层的摩擦学行为。考虑到 ta-C 表面的形态、结构和机械性能，ta-C 涂层中的缺陷被归类为液滴、孔和尖峰。使用球盘摩擦计在 170 °C 的环境空气中进行摩擦测试。稳态时的摩擦系数为 0.08，磨损率为 4.3 × 10−6 mm3/Nm。为了解释摩擦和磨损行为，比较了不同滑动循环之间指定区域缺陷的形态和结构特性。