The effect of laser fluence and nature of ambient environments on the sputtering yield, surface modifications, crater depth, UV-visible absorption spectra, chemical composition, and micro hardness of Zr has been investigated. Nd: YAG laser (532 nm, 10 Hz, 6 ns) at different fluences varying from 16 to 60.8 Jcm−2 was employed as an irradiation source. All measurements are performed under two ambient environments of Ar and O2 at a constant pressure of 10 Torr. Quartz crystal microbalance has been employed for the measurement of sputtering yield of laser irradiated Zr. It is revealed that sputtering yield increases monotonically with increasing fluence under both environments however, it is higher in Ar as compared to O2 environment. Scanning electron microscope (SEM) has been used to explore the surface morphology. SEM analysis exhibits the formation of cones, ridges, and cracks at the central ablated areas whereas, laser-induced periodic surface structures, periodic ridges and sharp cones are observed at inner boundaries in both environments of Ar and O2. Sharp spikes are observed in both environments, however, their height and distinctness are more pronounced in Ar as compared to O2. Cones are characteristic features in Ar, whereas, cavities and channels are dominant features in O2 environment at outer boundaries. The formation and growth of surface structures are dependent upon laser fluence and ambient gas nature. The depth profilometry has been used to measure the crater depth of irradiated Zr target by using an optical microscope. UV visible spectroscopy and energy-dispersive X-ray analyses reveal the oxide formation in the case of Zr irradiation in O2 environment. The Vicker Micro-hardness tester has been employed to measure the hardness. The higher observed values of sputtering yield, crater depth and hardness of laser ablated Zr in Ar as compared to O2 are well correlated with distinct surface structures.

中文翻译：

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石英晶体微量天平和SEM分析探索Ar和O 2环境下Zr的激光溅射

研究了激光能量密度和周围环境的性质对Zr溅射产量，表面改性，弹坑深度，UV可见吸收光谱，化学成分和显微硬度的影响。Nd：以从16到60.8Jcm -2的不同通量的YAG激光（532nm，10Hz，6ns）被用作照射源。所有测量均在Ar和O 2的两个周围环境下以10 Torr的恒定压力进行。石英晶体微量天平已用于测量激光辐照Zr的溅射产率。揭示了在两种环境下，溅射产率随通量的增加而单调增加，但是与O 2相比，Ar的产率更高环境。扫描电子显微镜（SEM）已用于探索表面形态。SEM分析显示在中心烧蚀区域形成了锥体，脊和裂纹，而在Ar和O 2的两种环境的内部边界处都观察到了激光诱导的周期性表面结构，周期性的脊和尖锥。在两种环境中均观察到尖峰，但是与O 2相比，其高度和清晰度在Ar中更为明显。锥体是Ar中的特征，而空穴和通道是O 2中的主要特征。外边界的环境。表面结构的形成和生长取决于激光能量密度和环境气体的性质。深度轮廓仪已被用于通过使用光学显微镜来测量被辐照的Zr靶的坑深。紫外可见光谱和能量色散X射线分析揭示了在O 2环境中Zr照射下氧化物的形成。维氏显微硬度测试仪已用于测量硬度。与O 2相比，Ar中较高的溅射产量，火山口深度和激光烧蚀Zr硬度的观测值与不同的表面结构密切相关。