ion, represents important paths leading to nucleation and growth. The combination of TMS concentration and NC residence time controls the NC mean size and the corresponding distributions. For higher precursor concentrations, the reaction kinetics is sufficiently fast to promote coalescence.

中文翻译：

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常压微等离子体解离四甲基硅烷用于 SiC 纳米晶体的生长

离子，代表导致成核和生长的重要路径。TMS 浓度和 NC 停留时间的组合控制 NC 平均大小和相应的分布。对于较高的前体浓度，反应动力学足够快以促进聚结。