A fabrication process allowing for the production of periodically poled lithium niobate (PPLN) photonic devices with any domain pattern and unit size down to 200 nm is developed by combining semiconductor fabrication techniques and piezo-force-microscopy tips polarization. Based on this fabrication process, PPLN microdisk resonators with quality factors of 8×104 were fabricated from a Z-cut lithium niobate film. Second-harmonic generation (SHG) utilizing d33 in the whole cavity was demonstrated in a PPLN microdisk with a 2 μm-spatial-period radial domain pattern. The SHG conversion efficiency was measured to be 1.44×10−5 mW−1. This work paves the way to fabricate complex PPLN photonic devices and to obtain efficient nonlinear optical effects that have wide applications in both classical and quantum optics.

中文翻译：

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在周期性极化铌酸锂微盘谐振器中使用 d₃₃ 产生二次谐波

通过结合半导体制造技术和压电力显微镜尖端极化，开发了一种制造工艺，允许生产具有任何域图案和单元尺寸低至 200 nm 的周期性极化铌酸锂 (PPLN) 光子器件。基于这种制造工艺，采用 Z 型切割铌酸锂薄膜制造了品质因数为 8×104 的 PPLN 微盘谐振器。在具有 2 μm 空间周期径向域模式的 PPLN 微盘中证明了在整个腔中利用 d33 的二次谐波生成 (SHG)。测量的 SHG 转换效率为 1.44×10-5 mW-1。这项工作为制造复杂的 PPLN 光子器件和获得在经典和量子光学中具有广泛应用的高效非线性光学效应铺平了道路。