All-Optical Modulation in Chains of Silicon Nanoantennas,ACS Photonics

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All-Optical Modulation in Chains of Silicon Nanoantennas
ACS Photonics ( IF 6.5 ) Pub Date : 2020-02-28 , DOI: 10.1021/acsphotonics.9b01678
Lu Ding ₁ , Dmitry Morits ₁ , Reuben Bakker ₁ , Shiqiang Li ₁ , Damien Eschimese ₁ , Shiyang Zhu ₂ , Ye Feng Yu ₁ , Ramon Paniagua-Dominguez ₁ , Arseniy I. Kuznetsov ₁

Affiliation

Dielectric nanoantennas represent a new branch of nanophotonics that allows efficient control of light scattering at nanoscale. Coupled nanoantennas can guide light on a chip over large distances without radiation losses, enabling a new nanoantenna-based silicon photonics platform with enchanced functionalities for light-on-chip integration. Here, an all-optical on-chip modulator based on a one-dimensional chain of silicon nanoantennas is proposed and experimentally demonstrated in the 1.55 μm telecommunication wavelength range. A resonator, with a quality factor up to 10⁴, is designed on the basis of a chain of coupled silicon nanoantennas, each supporting the electric dipole Mie resonance. Wafer-level fabrication of the nanoantennas is realized using CMOS compatible photolithography. High-speed modulation of the cavity mode is experimentally demonstrated via optical injection of free electrons and holes using a pulsed laser. The modulator is shown to have a response time of 50 ps and modulation depth beyond 25 dB, with 10 dB switching power being as low as ∼50 fJ. Low power and high-speed switching of the proposed device combined with the large-scale fabrication capabilities pave the way to applications of this dielectric nanoantenna-based approach to industrial on-chip photonics.

中文翻译：

硅纳米天线链中的全光调制

介电纳米天线代表了纳米光子学的一个新分支，可以有效控制纳米级的光散射。耦合的纳米天线可以在不影响辐射的情况下在很长的距离上引导芯片上的光，从而为基于纳米天线的新型硅光子学平台提供了具有增强功能的芯片上光集成。在此，提出了一种基于一维硅纳米天线链的全光片上调制器，并在1.55μm的电信波长范围内进行了实验证明。质量因子高达10 ^4的谐振器，是根据一系列耦合的硅纳米天线设计的，每个硅纳米天线都支持电偶极Mie共振。纳米天线的晶圆级制造是使用CMOS兼容光刻技术实现的。通过使用脉冲激光对自由电子和空穴进行光学注入，实验证明了腔模的高速调制。该调制器的响应时间为50 ps，调制深度超过25 dB，而10 dB的开关功率则低至约50 fJ。拟议器件的低功耗和高速开关功能与大规模制造能力相结合，为将这种基于电介质纳米天线的方法应用于工业片上光子学铺平了道路。

更新日期：2020-02-28

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