Abstract The acetone level in diabetic patients is double that in healthy people, and is important not only for biosensors but also for gas sensors. In this study, carbon nanowall (CNW) was grown on a substrate using a microwave-plasma-enhanced chemical vapor deposition system with a mixture of methane (CH4) and hydrogen (H2) gases for acetone sensing. Zinc oxide (ZnO) and aluminum-doped ZnO (AZO) were deposited on the CNW using a radio frequency magnetron sputtering system with 4-inch AZO and ZnO targets. The surface structures of the AZO/CNW and ZnO/CNW were confirmed through Raman spectroscopy and field emission scanning electron microscopy. The detection characteristics were then confirmed using a current multimeter. A 200 mV voltage was applied to the electrode corresponding to the source and drain of each sample, and the organic matter was evaporated to confirm the acetone gas selectivity through the electrical variation of the samples.

中文翻译：

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用于丙酮传感的氧化锌沉积碳纳米壁

摘要 糖尿病患者的丙酮水平是健康人的两倍，不仅对生物传感器很重要，对气体传感器也很重要。在这项研究中，碳纳米壁 (CNW) 使用微波等离子体增强化学气相沉积系统与甲烷 (CH4) 和氢气 (H2) 气体的混合物在基板上生长，用于丙酮传感。使用具有 4 英寸 AZO 和 ZnO 靶的射频磁控溅射系统将氧化锌 (ZnO) 和铝掺杂的 ZnO (AZO) 沉积在 CNW 上。通过拉曼光谱和场发射扫描电子显微镜证实了 AZO/CNW 和 ZnO/CNW 的表面结构。然后使用电流万用表确认检测特性。每个样品的源极和漏极对应的电极上施加200 mV的电压，