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Experiment study on etching process of graphite electrode by DC hydrogen plasma
Plasma Processes and Polymers ( IF 2.9 ) Pub Date : 2020-02-24 , DOI: 10.1002/ppap.201900242
Lin Long 1 , Weixing Zhou 1 , Jingfeng Tang 1 , Desheng Zhou 1
Affiliation  

DC (direct current) graphite electrodes were used to investigate the hydrogen plasma etching characteristics. Results show that the intermittent spark is marked by physical etching, whereas glow discharge is marked by chemical etching. CH4 is the main gas product, together with the existence of C2H6, C2H4, C3H8, and C3H6. A detailed analysis of the 20‐mA glow discharge showed that the chemical reactions due to the plasma occur mainly through hydrogenation reactions on graphite defects, and different plasma action zones on the graphite also play different roles. Additionally, plasma gaseous reaction processes were analyzed through free radical reactions.

中文翻译:

直流氢等离子体刻蚀石墨电极的实验研究

DC(直流)石墨电极用于研究氢等离子体刻蚀特性。结果表明,间歇火花通过物理蚀刻来标记,辉光放电通过化学蚀刻来标记。CH 4是主要的气体产物,同时存在C 2 H 6,C 2 H 4,C 3 H 8和C 3 H 6。对20mA辉光放电的详细分析表明,等离子体引起的化学反应主要是通过石墨缺陷上的氢化反应发生的,并且石墨上不同的等离子体作用区也起着不同的作用。另外,通过自由基反应分析了等离子体气态反应过程。
更新日期:2020-02-24
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