Improvement of sensitivity of electrical piezoresistive sensors is critical for high‐precision and ultrasensitive detection, which mainly depends on the modulation ability of total resistance of sensor under applied pressure. However, in most of the reported sensor devices, the contact resistance and body resistance (the key parts of total resistance of sensor) generally cannot be modulated simultaneously, which results in the limited sensitivity. In this work, an ultrahighly sensitive piezoresistive pressure sensor with an exquisitely designed structure is demonstrated, providing an uncomparable advantage of synergistic modulation of contact resistance and body resistance under applied pressure. As a result, the sensor shows excellent sensing performance, with the highest sensitivity up to 11 668.6 kPa⁻¹, the detection limit as low as 0.425 Pa, and the great stability over 20 000 cycle measurements. In respect of practical application, the high sensitivity endows the sensor with high‐precision recognition ability for detecting the weak pressure signals such as sound wave of ringtone and fluctuation of breath or pulse. These results suggest the synergistic resistance modulation to be an effective method toward piezoresistive pressure sensors with ultrahigh sensitivity and offer a new strategy for the achievement of high‐performance pressure sensors.

中文翻译：

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面向超高灵敏度压阻式压力传感器的协同电阻调制

电压阻传感器的灵敏度的提高对于高精度和超灵敏检测至关重要，这主要取决于施加压力时传感器总电阻的调制能力。然而，在大多数报道的传感器设备中，接触电阻和主体电阻（传感器总电阻的关键部分）通常不能同时进行调制，这导致灵敏度受到限制。在这项工作中，展示了一种具有精巧设计结构的超高灵敏度压阻式压力传感器，在施加压力下提供了接触电阻和人体电阻的协同调制的无与伦比的优势。结果，该传感器表现出出色的感测性能，最高灵敏度高达11 668.6 kPa ^-1，检测限低至0.425 Pa，并且在2万次循环测量中具有很高的稳定性。在实际应用中，高灵敏度赋予了传感器高精度的识别能力，可检测诸如铃声声波以及呼吸或脉动波动等微弱的压力信号。这些结果表明，协同电阻调制是一种具有超高灵敏度的压阻式压力传感器的有效方法，并为实现高性能压力传感器提供了新的策略。