Abstract In present work, MnO2 thin films with tetragonal and birnessite-phases are deposited using chemical bath deposition (CBD) and successive ionic layer adsorption and reaction (SILAR) methods. The surface morphology of MnO2 film is modified using different deposition parameters. These films are characterized by X-ray diffraction (XRD), fourier transform infrared (FTIR) spectroscopy, field- emission scanning electron microscopy (FE-SEM), Brunarer-Emmett-Teller (BET) and Barrette-Joynere-Halenda (BJH) method. The electrochemical properties are studied using cyclic voltammetry, galvanostatic charge–discharge and electrochemical impedance spectroscopy techniques in 1 M Na2SO4 electrolyte. The CBD method exhibits excellent electrochemical performance with maximum specific capacitance of 757F g−1 at scan rate 5 mV s−1, energy density of 74 Wh kg−1 at power density of 1.5 kW kg−1. The large area solid state symmetric devices fabricated with CBD MnO2 film electrodes exhibit maximum specific capacitance of 128F g−1 with energy density of 14 Wh kg−1 at power density of 0.2 kW kg−1 with capacitive retention of 90% after 5000 CV cycles. Such device is able to glow 211 red LEDs for the period of 160 s, showing it’s possible potential for commercialization.

中文翻译：

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化学浴和连续离子层吸附反应沉积法沉积的二氧化锰薄膜及其超级电容性能

摘要 在目前的工作中，使用化学浴沉积 (CBD) 和连续离子层吸附和反应 (SILAR) 方法沉积具有四方相和水钠锰矿相的 MnO2 薄膜。MnO2 薄膜的表面形貌使用不同的沉积参数进行修改。这些薄膜的特征在于 X 射线衍射 (XRD)、傅里叶变换红外 (FTIR) 光谱、场发射扫描电子显微镜 (FE-SEM)、Brunarer-Emmett-Teller (BET) 和 Barrette-Joynere-Halenda (BJH)方法。使用循环伏安法、恒电流充放电和电化学阻抗谱技术在 1 M Na2SO4 电解质中研究电化学性质。CBD 方法表现出优异的电化学性能，最大比电容为 757F g-1，扫描速率为 5 mV s-1，能量密度为 74 Wh kg-1，功率密度为 1.5 kW kg-1。用 CBD MnO2 薄膜电极制造的大面积固态对称器件在 0.2 kW kg-1 的功率密度下表现出 128F g-1 的最大比电容，能量密度为 14 Wh kg-1，5000 次 CV 循环后电容保持率为 90% . 这种设备能够在 160 秒内发光 211 个红色 LED，显示出它可能的商业化潜力。