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Plasma‐assisted gas‐phase synthesis and in‐line coating of silicon nanoparticles
Plasma Processes and Polymers ( IF 2.9 ) Pub Date : 2020-02-21 , DOI: 10.1002/ppap.201900245
Malini Dasgupta 1 , Paolo Fortugno 1 , Hartmut Wiggers 1, 2
Affiliation  

This study investigates the feasibility of plasma‐supported in‐line functionalization of silicon nanoparticles (NPs) in an atmospheric pressure gas‐phase reactor. The approach utilizes the synthesis of core silicon NPs and their subsequent coating downstream of the particle formation zone. In‐line coating is accomplished with a cylindrical coating nozzle to achieve homogenous mixing of coating precursor vapors with in‐coming NPs. Multiple siloxanes were tested for their coating suitability and their ability towards coating homogeneity. It was found that tetraethyl orthosilicate is favored for thin layers consisting of almost pure silica while hexamethyldisiloxane and octamethylcyclotetrasiloxane (OMCTS) coatings contained reasonable amounts of hydrocarbons. Moreover, OMCTS showed a pronounced tendency towards homogeneous nucleation, thus leading to the additional formation of silica NPs due to homogeneous nucleation.

中文翻译:

硅纳米粒子的等离子体辅助气相合成和在线涂层

这项研究调查了在大气压气相反应器中进行等离子体支持的硅纳米颗粒(NPs)在线功能化的可行性。该方法利用了核心硅NP的合成及其在颗粒形成区下游的后续涂层。在线涂层是通过圆柱形涂层喷嘴完成的,以实现涂层前体蒸气与进入的NP的均匀混合。测试了多种硅氧烷的涂层适应性和涂层均一性。已发现原硅酸四乙酯适用于由几乎纯净的二氧化硅组成的薄层,而六甲基二硅氧烷和八甲基环四硅氧烷(OMCTS)涂层则包含合理量的烃。而且,OMCTS表现出明显的趋于均匀成核的趋势,
更新日期:2020-02-21
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