High-quality micro/nanolens arrays (M/NLAs) are becoming irreplaceable components of various compact and miniaturized optical systems and functional devices. There is urgent requirement for a low-cost, high-efficiency, and high-precision technique to manufacture high-quality M/NLAs to meet their diverse and personalized applications. In this paper, we report the one-step maskless fabrication of M/NLAs via electrohydrodynamic jet (E-jet) printing. In order to get the best morphological parameters of M/NLAs, we adopted the stable cone-jet printing mode with optimized parameters instead of the micro dripping mode. The optical parameters of M/NLAs were analyzed and optimized, and they were influenced by the E-jet printing parameters, the wettability of the substrate, and the viscosity of the UV-curable adhesive. Thus, diverse and customized M/NLAs were obtained. Herein, we realized the fabrication of nanolens with a minimum diameter of 120 nm, and NLAs with different parameters were printed on a silicon substrate, a cantilever of atomic force microscopy probe, and single-layer graphene.

中文翻译：

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通过电动流体动力喷射印刷技术实现微尺度/纳米透镜阵列的跨尺度加法直接写入制作

高质量的微纳诺阵列（M / NLA）成为各种紧凑和小型化的光学系统和功能设备的不可替代的组成部分。迫切需要一种低成本，高效率和高精度的技术来制造高质量的M / NLA，以满足其多样化和个性化的应用。在本文中，我们报告了通过电动流体喷射（E-jet）印刷进行M / NLA的一步法无掩模制造。为了获得最佳的M / NLA形态学参数，我们采用了具有优化参数的稳定锥喷打印模式，而不是微滴模式。对M / NLA的光学参数进行了分析和优化，这些参数受E-jet印刷参数，基材的润湿性和UV固化粘合剂的粘度的影响。从而，获得了多种和定制的M / NLA。在这里，我们实现了最小直径为120 nm的纳米透镜的制造，并将具有不同参数的NLA印刷在硅基板，原子力显微镜探针的悬臂和单层石墨烯上。