Abstract High-entropy alloys films with the composition of MoNbHfZrTiN and MoNbHfZrTiON are fabricated by a reactive RF magnetron sputtering, which have a good solar spectral selectivity and are used for solar thermal absorption coatings. By changing the flow rate of Ar/N2/O2, the metallic content of each layer of the coatings can be controlled, which forms the MoNbHfZrTiN layer with high metallic content and the MoNbHfZrTiON layer with low metallic content. By tailoring the deposition parameters, a novel Al/MoNbHfZrTiN/MoNbHfZrTiON/SiO2 coating has been successfully deposited on SS substrate for the purpose of shifting the absorption edge to the higher wavelength. The coating exhibits a high absorptance of 0.935 and a low emittance of 0.09. The colors and optical properties of layer-added coatings are studied, and the color coordinates are drawn in the chromaticity diagram. By controlling the thickness of MoNbHfZrTiON and SiO2 layers, the colored Al/MoNbHfZrTiN/MoNbHfZrTiON/SiO2 coatings are fabricated.

中文翻译：

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基于高熵合金 MoNbHfZrTi 的新型多层高温彩色太阳能吸收涂层：优化制备和色度研究

摘要 采用反应性射频磁控溅射法制备了由 MoNbHfZrTiN 和 MoNbHfZrTiON 组成的高熵合金薄膜，具有良好的太阳光谱选择性，用于太阳能热吸收涂层。通过改变Ar/N2/O2的流量，可以控制涂层各层的金属含量，形成金属含量高的MoNbHfZrTiN层和金属含量低的MoNbHfZrTiON层。通过调整沉积参数，一种新型的 Al/MoNbHfZrTiN/MoNbHfZrTiON/SiO2 涂层已成功沉积在 SS 基板上，目的是将吸收边缘转移到更高的波长。该涂层具有 0.935 的高吸收率和 0.09 的低发射率。研究了加层涂层的颜色和光学特性，并在色度图中绘制颜色坐标。通过控制 MoNbHfZrTiON 和 SiO2 层的厚度，制备了有色的 Al/MoNbHfZrTiN/MoNbHfZrTiON/SiO2 涂层。