Abstract This paper is focused on studies of hydrogen terminated diamond films deposited from CH3OH and H2 gas mixture. The polycrystalline diamond layers of different ratios of sp2/sp3 carbon phases and levels of H-termination were synthesized by Hot Filament Chemical Vapour Deposition (HF CVD) method. As-grown CVD diamond layers were naturally hydrogen terminated which results from the nature of the CVD growth process. It is well known that hydrogen is responsible for the hydrophobic properties of the diamond surface and for its p-type conductivity, however, knowledge about the influence of hydrogen on optically active centers is very limited. The performed photoluminescence studies have shown that chemically bonded hydrogen can passivate non-radiative defects making the radiative transition more probable. In present work the properties of diamond surface has been studied using SEM (morphology), X-ray Powder Diffraction (XRD), Raman and photoluminescence spectroscopies (structural quality, carbon phases composition, photoluminescence properties), FTIR spectroscopy (confirmation of H-termination), PL (photoluminescence), X-ray photoelectron spectroscopy (XPS) and contact angle (wetting properties-hydrogen termination).

中文翻译：

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CVD 金刚石层的氢终止效应

摘要 本文重点研究了由 CH3OH 和 H2 气体混合物沉积的氢封端金刚石薄膜。通过热丝化学气相沉积（HF CVD）方法合成了不同比例的 sp2/sp3 碳相和 H 终止水平的多晶金刚石层。由于 CVD 生长过程的性质，生长的 CVD 金刚石层自然终止于氢。众所周知，氢是造成金刚石表面疏水性及其 p 型导电性的原因，但是，关于氢对光学活性中心的影响的知识非常有限。进行的光致发光研究表明，化学键合的氢可以钝化非辐射缺陷，使辐射跃迁更有可能。