The beryllium (Be) films were prepared by vacuum evaporation with ultrasound on the glass slide substrates. The Be coating mainly consists of α-Be phase independent of ultrasonic vibration, while the texture and crystallinity are affected by ultrasonic vibration. With the increasing of ultrasonic power, the surface displays polygonal grains, but the grain size decreases from 130 nm to 60 nm. The cross section views show a transition from regular columnar structure to broken columnar structure owing to the ultrasonic mechanical agitation. When ultrasonic vibration is applied, the microstructure transforms from isolated islands to bicontinuous islands in the initial stage of film growth. In addition, the residual stress of Be films changes from a tensile stress to compressive stress under the effect of ultrasonic vibration, which is closely related to the transformation of microstructure.

通过在玻璃载片基板上进行超声真空蒸发来制备铍（Be）膜。Be涂层主要由与超声振动无关的α-Be相组成，而织构和结晶度受超声振动影响。随着超声功率的增加，表面呈现出多边形晶粒，但晶粒尺寸从130 nm减小到60 nm。横截面图示出了由于超声机械搅动而从规则的柱状结构到破碎的柱状结构的转变。当施加超声振动时，在膜生长的初始阶段，微结构从孤立的岛转变为双连续的岛。此外，在超声振动的作用下，Be膜的残余应力从拉伸应力变为压缩应力，