Abstract Freeform surfaces are widely used in advanced optical systems. In order to accurately measure freeform surfaces, an adaptive interferometer with deformable mirror (DM) has been developed for the freeform surface metrology. To ensure the efficiency, a stochastic parallel gradient descent (SPGD) and Newton iteration mixed algorithm to drive the DM has been proposed, it can achieve the minimum value of the optimization and is suitable for the different interferograms. The simulation and experimental results verify the correctness and feasibility of the proposed DM driving algorithm.

中文翻译：

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SPGD 和 Newton 迭代混合算法用于自由曲面测量

摘要 自由曲面广泛应用于先进的光学系统。为了准确测量自由曲面，已经开发了一种用于自由曲面测量的带有可变形镜 (DM) 的自适应干涉仪。为了保证效率，提出了一种随机并行梯度下降（SPGD）和牛顿迭代混合算法来驱动DM，它可以达到优化的最小值，适用于不同的干涉图。仿真和实验结果验证了所提出的DM驱动算法的正确性和可行性。