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Highly Sensitive Detection of Benzene, Toluene, and Xylene Based on CoPP-Functionalized TiO2 Nanoparticles with Low Power Consumption.
ACS Sensors ( IF 8.2 ) Pub Date : 2020-02-27 , DOI: 10.1021/acssensors.9b02310
Yunsung Kang 1 , Kwanhun Kim 1 , Byeonghwa Cho 1 , Yeunjun Kwak 1 , Jongbaeg Kim 1
Affiliation  

Among various metal oxides, titanium dioxide (TiO2) has received considerable interest as a gas-sensing material owing to its high reliability at high operating temperatures. Nonetheless, TiO2 generally has low sensitivity to target gases. In particular, TiO2-based sensors have difficulty in sensitively detecting benzene, toluene, and xylene (referred to as BTX). Moreover, the reported TiO2-based sensors have not simultaneously satisfied the demand for tens of ppb BTX detection and operation with low power consumption. This work proposes a BTX sensor using cobalt porphyrin (CoPP)-functionalized TiO2 nanoparticles as a sensing material on a suspended microheater fabricated by bulk micromachining for low power consumption. TiO2 nanoparticles show an enhanced sensitivity (245%) to 10 ppm toluene with CoPP functionalization. The proposed sensor exhibits high sensitivity to BTX at concentrations ranging from 10 ppm down to several ppb. The high reliability of the sensor is also explored through the long-time operation with repeated exposure to 10 ppm toluene for 14 h.

中文翻译:

基于CoPP功能化的低功耗TiO2纳米颗粒的苯,甲苯和二甲苯的高灵敏检测。

在各种金属氧化物中,由于二氧化钛(TiO2)在高工作温度下具有很高的可靠性,因此作为气体传感材料受到了广泛的关注。但是,TiO2通常对目标气体的敏感性较低。尤其是,基于TiO2的传感器很难灵敏地检测苯,甲苯和二甲苯(称为BTX)。而且,所报道的基于TiO 2的传感器不能同时满足数十ppb BTX检测和低功耗操作的需求。这项工作提出了一种BTX传感器,该传感器使用了由卟啉(CoPP)官能化的TiO2纳米颗粒作为传感材料,该传感器通过散装微机械加工制成,用于低功耗的悬浮式微型加热器。通过CoPP官能化,TiO2纳米颗粒对10 ppm的甲苯显示出更高的灵敏度(245%)。所提出的传感器在浓度范围从10 ppm到几ppb的范围内对BTX表现出高灵敏度。通过长时间操作并反复暴露于10 ppm的甲苯14小时,还可以探索传感器的高可靠性。
更新日期:2020-02-12
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