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Sputtering of nanostructured tungsten and comparison to modelling with TRI3DYN
Journal of Nuclear Materials ( IF 2.8 ) Pub Date : 2020-02-07 , DOI: 10.1016/j.jnucmat.2020.152019
R. Stadlmayr , P.S. Szabo , D. Mayer , C. Cupak , T. Dittmar , L. Bischoff , S. Möller , M. Rasiński , R.A. Wilhelm , W. Möller , F. Aumayr

He-induced nanostructured tungsten (so-called W-fuzz) was bombarded with Ar ions under 60° and the dynamic erosion behaviour was experimentally investigated. By using a highly sensitive quartz-crystal-microbalance technique in a particle catcher configuration, the sputtered particles distribution of W-fuzz could be evaluated. In contrast to a flat sample, where sputtered particles are emitted primarily in forward direction, we find that W-fuzz samples emit sputtered particles preferably in backward direction (i.e. in the direction of the incident ion beam). After continuous Ar irradiation of a W-fuzz sample the distribution approaches that of a flat sample. In addition to experimental data we also show modelling results obtained with a state-of-the-art Monte-Carlo (MC) binary collision approximation (BCA) code TRI3DYN in full 3D. Surface morphology changes as monitored by SEM as well as the dynamic sputtering behaviour can be well reproduced by the full 3D MC-BCA code.



中文翻译:

纳米钨的溅射及其与TRI3DYN建模的比较

在60°下用Ar离子轰击He诱导的纳米钨(所谓的W-绒毛),并通过实验研究了其动态腐蚀行为。通过在颗粒捕集器配置中使用高度敏感的石英微平衡技术,可以评估W-绒毛的溅射颗粒分布。与平面样品相反,在平面样品中,溅射粒子主要沿向前方向发射,我们发现W-fuzz样品优选向后方向(即,沿入射离子束的方向)发射溅射粒子。W-fuzz样品连续Ar照射后,分布接近平坦样品的分布。除了实验数据,我们还显示了使用最新的蒙特卡洛(MC)二元碰撞逼近(BCA)代码TRI3DYN以全3D模式获得的建模结果。

更新日期:2020-02-07
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