The self-organised plasma patterns, known as spokes or ionisation zones in magnetron sputtering discharges, were observed in a wide range of power densities, from low power direct current magnetron sputtering (dcMS) discharge to high power impulse magnetron sputtering (HiPIMS) discharge. For some target materials and non-reactive gases, it was observed that at very high power densities (> ##IMG## [http://ej.iop.org/images/0022-3727/53/15/155201/dab6a8cieqn001.gif] ) the plasma exhibits a transition from a regime where spokes are observed to a homogeneous plasma regime. In this contribution, we present a comparison of plasma properties: plasma emission (optical emission spectroscopy) and flux of argon and chromium ions (mass spectrometry), measured both in the spoke regime and in the homogeneous plasma regime, aimed to expand the understanding of the plasma transition between the two modes. A simple biased flat probe was used to distinguish between the s...

中文翻译：

---

铬HiPIMS放电中从自组织到均匀等离子体分布的过渡研究

从低功率直流磁控溅射（dcMS）放电到高功率脉冲磁控溅射（HiPIMS）放电，在各种功率密度范围内都观察到自组织等离子体图形，称为磁控管溅射放电中的辐条或电离区。对于某些目标材料和非反应性气体，观察到在非常高的功率密度下（> ## IMG ## [http://ej.iop.org/images/0022-3727/53/15/155201/dab6a8cieqn001 [gif]）血浆呈现出从观察辐条的状态过渡到均匀血浆状态的过程。在此文稿中，我们比较了等离子体特性：在辐条状态和均质等离子体状态下测量的等离子体发射（光学发射光谱）和氩气和铬离子的通量（质谱），目的在于扩大对两种模式之间等离子体转变的理解。一个简单的偏置扁平探头用于区分两个探头。