In this paper, we propose a compact plasmonic sensor structure comprised of a metal-dielectric-metal (MDM) waveguide, and a baffle plate in waveguide core and two side-coupled rectangular cavities. In this structure, two Fano resonances are achieved and can be tuned independently by changing the structural parameters of the cavities. Especially, when the resonant wavelengths of the two Fano resonances are the same, the sensing sensitivity can be enhanced by coupling between two Fano resonances. By investigating the transmission spectrum, the effect of structural parameters on Fano resonances and the refractive index sensitivity of the sensor structure are analyzed in detail. The numerical simulations demonstrate a sensitivity as high as 1295nm/RIU and a figure of merit of 1647.

中文翻译：

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具有两个侧面耦合的法诺腔的高灵敏度等离子金属电介质器件

在本文中，我们提出了一种紧凑的等离子传感器结构，该结构由金属-电介质-金属（MDM）波导，波导芯中的挡板和两个侧面耦合的矩形腔组成。在这种结构中，可以实现两个Fano共振，并且可以通过更改空腔的结构参数来独立地对其进行调谐。特别地，当两个法诺共振的共振波长相同时，可以通过两个法诺共振之间的耦合来增强感测灵敏度。通过研究透射光谱，详细分析了结构参数对Fano共振的影响以及传感器结构的折射率灵敏度。数值模拟表明灵敏度高达1295nm / RIU，品质因数为1647。