A linear piezoelectric micromachined ultrasound transducer (PMUT) array was fabricated and integrated into a device for photoacoustic imaging (PAI) of tissue phantoms. The PMUT contained 65 array elements, with each element having 60 diaphragms of [Formula: see text] diameter and [Formula: see text] pitch. A lead zirconate titanate (PZT) thin film was used as the piezoelectric layer. The in-air vibration response of the PMUT array elements showed a first mode resonance between 6 and 8 MHz. Hydrophone measurements showed 16.2 kPa average peak ultrasound pressure output at 7.5 mm from one element excited with 5 Vpp input. A receive sensitivity of ~0.48 mV/kPa was observed for a PMUT array element with 0 dB gain. The PMUT array was bonded to a custom-printed circuit board to enable compact integration with an optical fiber bundle for PAI. A broad photoacoustic bandwidth of ~89% was observed for the photoacoustic response captured from absorbing pencil lead targets. Linear scanning of a single element of a PMUT array was performed on different tissue phantoms embedded with light-absorbing targets to successfully demonstrate B-mode PAI using PMUTs.

中文翻译：

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使用压电微机械超声换能器 (PMUT) 的光声成像设备。


制造了线性压电微机械超声换能器 (PMUT) 阵列并将其集成到用于组织模型光声成像 (PAI) 的设备中。 PMUT 包含 65 个阵列元件，每个元件具有 60 个直径为 [公式：见正文] 和节距的膜片。使用锆钛酸铅（PZT）薄膜作为压电层。 PMUT 阵列元件的空气振动响应显示出 6 至 8 MHz 之间的第一模式共振。水听器测量显示，在 5 Vpp 输入激励下的一个元件在 7.5 mm 处产生 16.2 kPa 的平均峰值超声压力输出。对于具有 0 dB 增益的 PMUT 阵列元件，观察到约 0.48 mV/kPa 的接收灵敏度。 PMUT 阵列粘合到定制印刷电路板上，以便与 PAI 光纤束紧密集成。从吸收铅笔芯目标捕获的光声响应观察到约 89% 的宽光声带宽。在嵌入光吸收目标的不同组织模型上对 PMUT 阵列的单个元件进行线性扫描，成功地演示了使用 PMUT 的 B 模式 PAI。