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3D Simulation of the Coil Geometry Effect on the Induction Heating Process in Czochralski Crystal Growth System
Crystal Research and Technology ( IF 1.5 ) Pub Date : 2020-02-03 , DOI: 10.1002/crat.201900147 Hamed Heidari 1 , Mohammad Hossein Tavakoli 2 , AbdolJabbar Shokri 3 , Behnam Mohamad Moradi 4 , Omid Mohammad Sharifi 1 , M. Jamil M. Asaad 5
Crystal Research and Technology ( IF 1.5 ) Pub Date : 2020-02-03 , DOI: 10.1002/crat.201900147 Hamed Heidari 1 , Mohammad Hossein Tavakoli 2 , AbdolJabbar Shokri 3 , Behnam Mohamad Moradi 4 , Omid Mohammad Sharifi 1 , M. Jamil M. Asaad 5
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Herein, influence of coil geometry in a Czochralski crystal growth system is studied using 3D finite element method. Three different geometries for the helical RF‐coil including solenoid, conical solenoid, and rectangular are considered and distribution of magnetic flux density (through the system), produced heat in the RF‐coil and the graphite crucible, as well as heat volume integral are calculated. The obtained numerical results show that every considered coil produces a special heating structure due to its shape with some advantages and disadvantages.
中文翻译：
直拉晶体生长系统中线圈几何形状对感应加热过程的3D模拟
在此，使用3D有限元方法研究了直拉晶体生长系统中线圈几何形状的影响。考虑了螺旋形射频线圈的三种不同几何形状，包括螺线管，圆锥形螺线管和矩形，并确定了磁通密度（通过系统）的分布，射频线圈和石墨坩埚中产生的热量以及热量的积分计算。所得的数值结果表明，每个考虑的线圈由于其形状而产生特殊的加热结构，具有一些优点和缺点。
更新日期：2020-03-12
中文翻译：
直拉晶体生长系统中线圈几何形状对感应加热过程的3D模拟
在此，使用3D有限元方法研究了直拉晶体生长系统中线圈几何形状的影响。考虑了螺旋形射频线圈的三种不同几何形状，包括螺线管，圆锥形螺线管和矩形，并确定了磁通密度（通过系统）的分布，射频线圈和石墨坩埚中产生的热量以及热量的积分计算。所得的数值结果表明，每个考虑的线圈由于其形状而产生特殊的加热结构，具有一些优点和缺点。
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