Effect of Gas Atmosphere in the Heating Stage on Limiting Nucleation of Graphene on Copper Foils by Low Pressure Chemical Vapor Deposition,Crystal Research and Technology

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Effect of Gas Atmosphere in the Heating Stage on Limiting Nucleation of Graphene on Copper Foils by Low Pressure Chemical Vapor Deposition
Crystal Research and Technology ( IF 1.5 ) Pub Date : 2020-02-03 , DOI: 10.1002/crat.201900181
Yonggui Shi ₁ , Yunwei Wang ₂ , Yang Ren ₁ , Yuhui Wan ₁

Affiliation

To investigate the effect of gas atmosphere in the heating stage of graphene fabrication on graphene nucleation, hydrogen and nitrogen are introduced into the furnace respectively in the heating stage. The results show that graphene growing on copper foils heated in nitrogen atmosphere and in hydrogen atmosphere present different nucleation characteristics. The analysis implies that the gas atmosphere in the heating stage affects the graphene nucleation and growth by changing the morphology of the copper surface and the inherent carbon concentration in the substrate, and this change actually results from the interaction of the copper surface and the gas atmosphere. The difference in size and quality of the fabricated graphene domains also indicates nitrogen atmosphere in the heating stage favors fabricating large‐sized graphene domains with good quality. Thus, substituting hydrogen for nitrogen in the heating stage would be a simpler and easier way to depress graphene nucleation as well as improve the graphene quality.

中文翻译：

加热气氛对低压化学气相沉积限制铜箔上石墨烯成核的影响

为了研究石墨烯制造的加热阶段中的气氛对石墨烯成核的影响，在加热阶段分别将氢和氮引入炉中。结果表明，在氮气氛和氢气氛下加热的铜箔上生长的石墨烯具有不同的成核特性。分析表明，加热阶段的气体气氛通过改变铜表面的形态和基底中固有的碳浓度来影响石墨烯的形核和生长，而这种变化实际上是由铜表面与气体气氛的相互作用引起的。所制造的石墨烯域的尺寸和质量的差异还表明，在加热阶段的氮气气氛有利于制造高质量的大尺寸石墨烯域。因此，在加热阶段用氢代替氮将是抑制石墨烯成核以及改善石墨烯质量的更简单方法。

更新日期：2020-03-12

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