We present a comparison of the precision of different approaches for orientation imaging using electron backscatter diffraction (EBSD) in the scanning electron microscope. We have used EBSD to image the internal structure of WC grains, which contain features due to dislocations and subgrains. We compare the conventional, Hough‐transform based orientation results from the EBSD system software with results of a high‐precision orientation refinement using simulated pattern matching at the full available detector resolution of 640 × 480 pixels. Electron channelling contrast imaging (ECCI) is used to verify the correspondence of qualitative ECCI features with the quantitative orientation data from pattern matching. For the investigated sample, this leads to an estimated pattern matching sensitivity of about 0.5 mrad (0.03°) and a spatial feature resolution of about 100 nm. In order to investigate the alternative approach of postprocessing noisy orientation data, we analyse the effects of two different types of orientation filters. Using reference features in the high‐precision pattern matching results for comparison, we find that denoising of orientation data can reduce the spatial resolution, and can lead to the creation of orientation artefacts for crystallographic features near the spatial and orientational resolution limits of EBSD.

中文翻译：

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通过全模式匹配的方向细化提高 EBSD 精度

我们比较了在扫描电子显微镜中使用电子背散射衍射 (EBSD) 进行定向成像的不同方法的精度。我们已使用 EBSD 对 WC 晶粒的内部结构进行成像，其中包含由于位错和亚晶粒而产生的特征。我们将来自 EBSD 系统软件的传统的、基于霍夫变换的定向结果与使用模拟模式匹配在 640 × 480 像素的完整可用探测器分辨率下进行高精度定向细化的结果进行比较。电子通道对比成像 (ECCI) 用于验证定性 ECCI 特征与来自模式匹配的定量方向数据的对应关系。对于所研究的样本，这导致估计的模式匹配灵敏度约为 0.5 mrad (0. 03°）和约 100 nm 的空间特征分辨率。为了研究后处理嘈杂方向数据的替代方法，我们分析了两种不同类型的方向滤波器的影响。使用高精度模式匹配结果中的参考特征进行比较，我们发现对取向数据进行去噪会降低空间分辨率，并可能导致在 EBSD 的空间和取向分辨率极限附近为晶体学特征产生取向伪影。