Abstract Emergence of products that feature functional surfaces with complex geometries, such as freeform optics in consumer electronics and augmented reality and virtual reality, requires high-accuracy non-contact surface measurement. However, large discrepancies are often observed between the measurement results of optical methods and contact stylus methods, especially for complex surfaces. For interference microscopy, such as coherence scanning interferometry, the three-dimensional surface transfer function provides information about the instrument spatial frequency passband and about lens aberrations that can result in measurement errors. Characterisation and phase inversion of the instrument's three-dimensional surface transfer function yields an inverse filter that can be applied directly to the three-dimensional fringe data. The inverse filtering is shown to reduce measurement errors without using any data processing or requiring any a priori knowledge of the surface. We present an experimental verification of the characterisation and correction process for measurements of several freeform surfaces and an additive manufactured surface. Corrected coherence scanning interferometry measurements agree with traceable contact stylus measurements to the order of 10 nm.

中文翻译：

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干涉显微镜中的镜头像差补偿

摘要 具有复杂几何形状的功能表面的产品的出现，例如消费电子产品中的自由曲面光学以及增强现实和虚拟现实，需要高精度的非接触式表面测量。然而，光学方法和接触式触控笔方法的测量结果经常存在较大差异，特别是对于复杂表面。对于干涉显微术，例如相干扫描干涉测量法，三维表面传递函数提供有关仪器空间频率通带和可能导致测量误差的透镜像差的信息。仪器的三维表面传递函数的表征和相位反转产生了可以直接应用于三维条纹数据的逆滤波器。逆滤波被证明可以在不使用任何数据处理或不需要任何表面先验知识的情况下减少测量误差。我们对几种自由曲面和增材制造表面的测量进行表征和校正过程的实验验证。校正的相干扫描干涉测量与可追踪的接触式触控笔测量一致，达到 10 nm 的数量级。