Vacuum ultraviolet spectroscopy of cold atmospheric pressure plasma jets,Plasma Processes and Polymers

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Vacuum ultraviolet spectroscopy of cold atmospheric pressure plasma jets
Plasma Processes and Polymers ( IF 2.9 ) Pub Date : 2020-01-27 , DOI: 10.1002/ppap.201900216
Judith Golda ₁ , Beatrix Biskup ₂ , Vincent Layes ₂ , Tristan Winzer ₁ , Jan Benedikt ₁

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Due to elevated pressure, cold atmospheric pressure plasmas generate excimer species, which can emit highly energetic photons, thus transferring energy inside the discharge and to treated substrates. However, they are difficult to assess, as they are absorbed by air or window material. Here, we present a method to measure vacuum ultraviolet photons using a monochromator with an aerodynamic window. The emission spectra of a radiofrequency‐excited atmospheric plasma jet were analyzed for typical gas mixtures. The data indicate that helium excimers contribute notably to the excitation of molecular and atomic species. The emission intensities do not follow densities of ground‐state species, underlining the variety of excitation channels and the change of the electron energy distribution function under changing gas composition.

中文翻译：

冷常压等离子体射流的真空紫外光谱

由于压力升高，冷的大气压等离子体会产生受激准分子，这些受激准分子可以发射高能光子，从而将能量转移到放电内部并转移到处理过的基板上。但是，由于它们被空气或窗户材料吸收，因此难以评估。在这里，我们介绍一种使用带有空气动力学窗口的单色仪测量真空紫外光子的方法。分析了典型气体混合物的射频激发大气等离子流的发射光谱。数据表明，氦准分子显着地促进了分子和原子种类的激发。发射强度不随基态物质的密度而变化，这强调了激发通道的多样性以及在气体成分变化下电子能量分布函数的变化。

更新日期：2020-01-27

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