A comprehensive data set is presented that covers eigenvalues and dynamic stiffness of picket-shaped microcantilevers for a wide range of the taper ratio and tip mass ratios. The shape of these microcantilevers is such that most of the length is of uniform cross section and the end segment of the beam is width-tapered to a point at the free end. This configuration is widely used in MEMS devices. Closed form expressions are presented for the eigenvalues, and for static and dynamic stiffness. These expressions could help designers and researchers in the MEMS field in general, and atomic force microscopy in particular.

中文翻译：

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尖形悬臂的特征值和动态刚度

提出了一个综合的数据集，该数据集涵盖了锥度比和尖端质量比范围广泛的尖形微悬臂梁的特征值和动态刚度。这些微悬臂的形状使得大部分长度具有均匀的横截面，并且光束的端部部分逐渐变细到自由端的一点。该配置被广泛用于MEMS器件中。为特征值，静态和动态刚度提供了封闭形式的表达式。这些表述可以帮助MEMS领域的设计人员和研究人员，特别是原子力显微镜。