The effects of cold SF₆ plasma treatment on amorphous hydrogenated carbon (FA), polypropylene (PP) and polystyrene (PS) were investigated as functions of gas pressure and applied power. An anticipated increase in hydrophobicity was confirmed by the greater water contact angles, θ, observed after all the treatments. Under the best conditions θ was increased by 50.8°, 57.2° and 21°, respectively. A rise and fall in θ was observed as the pressure of SF₆ was increased, this trend being most consistent for FA. Although the plasma treatments caused some changes in surface roughness, measured using profilometry, there were no clear correlations between this parameter and θ. As revealed by Energy Dispersive X-ray Spectroscopy (EDS) and X-ray Photoelectron Spectroscopy (XPS), the treated surfaces were fluorinated. As the degree of fluorination under optimal conditions was 2.2 at.%, 10.4 at.% and 36.3 at.% for the FA, PP and PS, respectively, this factor was not alone responsible for the observed increases in θ. Sulfur was attached to the surface of all the treated samples. The relative surface carbon content was reduced by the treatments. The main causes of the changes in θ upon treatment were the induced compositional and structural changes. Ageing for ten days caused a typical decrease in θ of ~10°, probably caused by rotation of hydrophobic surface groups into the surface.

研究了SF ₆冷等离子体处理对无定形氢​​化碳（FA），聚丙烯（PP）和聚苯乙烯（PS）的影响，这些影响是气压和施加功率的函数。在所有处理后观察到的更大的水接触角θ证实了疏水性的预期提高。在最佳条件下，θ分别增加了50.8°，57.2°和21°。随着SF ₆的压力，观察到θ的上升和下降增加了，这种趋势对于FA最为一致。尽管等离子处理导致表面粗糙度的某些变化（使用轮廓光度法测量），但该参数与θ之间没有明显的相关性。如能量分散X射线光谱法（EDS）和X射线光电子能谱法（XPS）所揭示的，处理过的表面是氟化的。由于在最佳条件下，FA，PP和PS的氟化度分别为2.2 at。％，10.4 at。％和36.3 at。％，因此该因素并非单独导致观察到的θ升高。硫附着在所有处理样品的表面。通过处理降低了相对表面碳含量。处理后θ变化的主要原因是引起的成分和结构变化。老化十天会导致θ典型降低约10°，