In this study, different sol-gel Nb₂O₅ films were prepared by using NbCl₅ as precursor, and acetylacetone (ACAC), diethanolamine (DEA) and citric acid (CA) as additive, respectively. The results showed that the film with ACAC as additive presented the highest absorption and stability, corresponding to the lowest laser-induced damage threshold (LIDT) of 18.9 J/cm², while that with CA as additive had the lowest absorption, corresponding to the highest LIDT of 24.9 J/cm². The film prepared with DEA as additive had the smallest surface roughness, and the LIDT was 21.1 J/cm². Moreover, although the films prepared with three different additives were all subjected to typically defect-induced damages, different types of damage features were observed. Finally, three structural evolution models of the films were proposed, accompanied by establishment of the relationship between the additives and the LIDT, which was of great significance to further understand the laser damage mechanism.

在这项研究中，以NbCl ₅为前驱体，并以乙酰丙酮（ACAC），二乙醇胺（DEA）和柠檬酸（CA）作为添加剂制备了不同的溶胶-凝胶Nb ₂ O ₅膜。结果表明，以ACAC为添加剂的薄膜具有最高的吸收和稳定性，对应最低的激光诱导损伤阈值（LIDT）为18.9 J / cm ²，而以CA为添加剂的薄膜具有最低的吸收率，对应于最高LIDT为24.9 J / cm ²。用DEA作为添加剂制备的薄膜表面粗糙度最小，LIDT为21.1 J / cm ²。而且，尽管用三种不同添加剂制备的膜都受到典型的由缺陷引起的损伤，但是观察到不同类型的损伤特征。最后，提出了三种薄膜的结构演化模型，并建立了添加剂与LIDT的关系，对进一步理解激光损伤机理具有重要意义。