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Hydrogenation and hybridization in hard W-C:H coatings prepared by hybrid PVD-PECVD method with methane and acetylene
International Journal of Refractory Metals & Hard Materials ( IF 2.794 ) Pub Date : 2020-01-23 , DOI: 10.1016/j.ijrmhm.2020.105211
František Lofaj; Margita Kabátová; Jozef Dobrovodský; Grzegorz Cempura

The investigations the influence of methane and acetylene additions in the hybrid PVD-PECVD W-C:H coatings driven by DCMS and HiPIMS on plasma polymerization processes, carbon matrix content, its hybridization, hydrogenation and hardness revealed numerous differences related to hydrocarbon gas type and sputtering method. Close correlations between the hydrogen to carbon concentration ratio in the hydrocarbon precursor and contents of carbon phase, its hydrogenation and hybridization were established. The increase of each of these parameters had detrimental effects on hardness due to the consumption of σ bonds for CH at the expense of cross-linking among CC chains. HiPIMS and acetylene were found to provide the highest hardness (~20 GPa) in W-C:H coatings within the hybrid PVD-PECVD regime, most probably due to the best combination of hybridization, hydrogenation and cross-linking of the carbon phase. A qualitative model of growth mechanism of W-C:H coatings during hybrid PVD-PECVD with different hydrocarbon precursors and sputtering methods was proposed.
更新日期:2020-01-23

 

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