The investigations the influence of methane and acetylene additions in the hybrid PVD-PECVD W-C:H coatings driven by DCMS and HiPIMS on plasma polymerization processes, carbon matrix content, its hybridization, hydrogenation and hardness revealed numerous differences related to hydrocarbon gas type and sputtering method. Close correlations between the hydrogen to carbon concentration ratio in the hydrocarbon precursor and contents of carbon phase, its hydrogenation and hybridization were established. The increase of each of these parameters had detrimental effects on hardness due to the consumption of σ bonds for CH at the expense of cross-linking among CC chains. HiPIMS and acetylene were found to provide the highest hardness (~20 GPa) in W-C:H coatings within the hybrid PVD-PECVD regime, most probably due to the best combination of hybridization, hydrogenation and cross-linking of the carbon phase. A qualitative model of growth mechanism of W-C:H coatings during hybrid PVD-PECVD with different hydrocarbon precursors and sputtering methods was proposed.

研究了由DCMS和HiPIMS驱动的混合PVD-PECVD WC：H涂料中甲烷和乙炔的添加对等离子体聚合过程，碳基质含量，其杂交，加氢和硬度的影响，揭示了与烃类气体类型和溅射方法有关的众多差异。建立了碳氢化合物前驱体中氢与碳的浓度比与碳相含量，其氢化和杂化之间的密切关系。这些参数中的每一个的增加都对硬度有不利影响，这是因为消耗了C H的σ键，而以C之间的交联为代价C链。在混合PVD-PECVD方案中，发现HiPIMS和乙炔在WC：H涂层中提供最高的硬度（约20 GPa），这很可能是由于碳相的杂交，氢化和交联的最佳组合。提出了在碳氢化合物前驱体和溅射方法混合PVD-PECVD过程中WC：H涂层生长机理的定性模型。