Abstract White light scanning interferometry is a very important technique for nanometrology. In this paper, a robust white light interference signal processing algorithm using random phase noise correction method is proposed. By analyzing the phase response of the correlgram mathematically, the phase noise is modelized by the combination of random noise and systematic deviation. The random noise can be corrected by assembling the least square result of phase information. As a result, the relationship between phase distribution and surface height is established in a more accurate way. The simulations show that the novel algorithm is capable of achieving robust measurements with standard deviation one tenth comparing to the scanning step length errors, and has an extremely high noise tolerance 14.25 nm with scanning step length 20 nm. In the experiments, a step height standard (VLSI, 182.7 ± 2.0 nm), a protected aluminum mirror and a drive shaft cover of aircraft engine were tested, where the repeatability error for the step height standard is 0.5 nm, the roughness repeatability of the mirror is only 0.03 nm, and the roughness repeatability of the cover is 5.14 nm, which proves the accuracy and robust of the algorithm.

中文翻译：

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基于随机相位噪声校正的白光干涉鲁棒表面恢复算法

摘要 白光扫描干涉测量法是纳米计量学中一项非常重要的技术。本文提出了一种利用随机相位噪声校正方法的鲁棒白光干涉信号处理算法。通过对相关图的相位响应进行数学分析，将随机噪声和系统偏差相结合对相位噪声进行建模。可以通过组合相位信息的最小二乘结果来校正随机噪声。结果，以更准确的方式建立了相分布和表面高度之间的关系。仿真表明，与扫描步长误差相比，新算法能够以十分之一的标准偏差实现稳健的测量，并且在扫描步长为 20 nm 时具有 14.25 nm 的极高噪声容限。